5/21/2010	9:35:07 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	9:35:08 AM	Recipe started at 9:35 AM
5/21/2010	9:35:08 AM	H2 valve closed
5/21/2010	9:35:08 AM	BCl3 valve closed
5/21/2010	9:35:08 AM	PH3 valve closed
5/21/2010	9:35:08 AM	SiCl4 pre valve closed
5/21/2010	9:35:08 AM	SiCl4 post valve closed
5/21/2010	9:35:08 AM	Main Vac valve closed
5/21/2010	9:35:08 AM	Bypass valve closed
5/21/2010	9:35:08 AM	Bubbler valve closed
5/21/2010	9:35:08 AM	Helium valve opened
5/21/2010	9:35:08 AM	Helium MFC set to  500.000000
5/21/2010	9:35:08 AM	H2 MFC set to  0.000000
5/21/2010	9:35:08 AM	BCl3 MFC set to  0.000000
5/21/2010	9:35:08 AM	SiCl4 MFC set to  0.000000
5/21/2010	9:35:08 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:35:08 AM	Tube furnace set to 0
5/21/2010	9:36:28 AM	Helium valve closed
5/21/2010	9:36:28 AM	H2 valve closed
5/21/2010	9:36:28 AM	BCl3 valve closed
5/21/2010	9:36:28 AM	PH3 valve closed
5/21/2010	9:36:28 AM	SiCl4 pre valve closed
5/21/2010	9:36:28 AM	SiCl4 post valve closed
5/21/2010	9:36:28 AM	Main Vac valve closed
5/21/2010	9:36:28 AM	Bypass valve closed
5/21/2010	9:36:28 AM	Bubbler valve closed
5/21/2010	9:36:28 AM	Helium MFC set to  0.000000
5/21/2010	9:36:28 AM	H2 MFC set to  0.000000
5/21/2010	9:36:28 AM	BCl3 MFC set to  0.000000
5/21/2010	9:36:28 AM	SiCl4 MFC set to  0.000000
5/21/2010	9:36:28 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:36:29 AM	Tube furnace set to 0
5/21/2010	9:36:29 AM	Run finished at 9:36 AM
5/21/2010	9:36:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	9:45:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	9:45:11 AM	Recipe started at 9:45 AM
5/21/2010	9:45:11 AM	Helium valve closed
5/21/2010	9:45:11 AM	H2 valve closed
5/21/2010	9:45:11 AM	BCl3 valve closed
5/21/2010	9:45:11 AM	PH3 valve closed
5/21/2010	9:45:11 AM	SiCl4 pre valve closed
5/21/2010	9:45:11 AM	SiCl4 post valve closed
5/21/2010	9:45:11 AM	Main Vac valve closed
5/21/2010	9:45:11 AM	Bubbler valve closed
5/21/2010	9:45:11 AM	Bypass valve opened
5/21/2010	9:45:11 AM	Helium MFC set to  0.000000
5/21/2010	9:45:11 AM	H2 MFC set to  0.000000
5/21/2010	9:45:11 AM	BCl3 MFC set to  0.000000
5/21/2010	9:45:11 AM	SiCl4 MFC set to  0.000000
5/21/2010	9:45:11 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:45:11 AM	Tube furnace set to 0
5/21/2010	9:45:58 AM	Helium valve closed
5/21/2010	9:45:58 AM	H2 valve closed
5/21/2010	9:45:58 AM	BCl3 valve closed
5/21/2010	9:45:58 AM	PH3 valve closed
5/21/2010	9:45:58 AM	SiCl4 pre valve closed
5/21/2010	9:45:58 AM	SiCl4 post valve closed
5/21/2010	9:45:58 AM	Bubbler valve closed
5/21/2010	9:45:58 AM	Main Vac valve opened
5/21/2010	9:45:58 AM	Bypass valve opened
5/21/2010	9:45:58 AM	Helium MFC set to  0.000000
5/21/2010	9:45:58 AM	H2 MFC set to  0.000000
5/21/2010	9:45:58 AM	BCl3 MFC set to  0.000000
5/21/2010	9:45:58 AM	SiCl4 MFC set to  0.000000
5/21/2010	9:45:58 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:45:58 AM	Tube furnace set to 0
5/21/2010	9:45:58 AM	Run finished at 9:45 AM
5/21/2010	9:45:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	9:48:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	9:48:25 AM	Recipe started at 9:48 AM
5/21/2010	9:48:25 AM	H2 valve closed
5/21/2010	9:48:25 AM	BCl3 valve closed
5/21/2010	9:48:25 AM	PH3 valve closed
5/21/2010	9:48:25 AM	SiCl4 pre valve closed
5/21/2010	9:48:25 AM	SiCl4 post valve closed
5/21/2010	9:48:25 AM	Main Vac valve closed
5/21/2010	9:48:25 AM	Bypass valve closed
5/21/2010	9:48:25 AM	Bubbler valve closed
5/21/2010	9:48:25 AM	Helium valve opened
5/21/2010	9:48:25 AM	Helium MFC set to  500.000000
5/21/2010	9:48:25 AM	H2 MFC set to  0.000000
5/21/2010	9:48:25 AM	BCl3 MFC set to  0.000000
5/21/2010	9:48:25 AM	SiCl4 MFC set to  0.000000
5/21/2010	9:48:25 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:48:25 AM	Tube furnace set to 0
5/21/2010	9:49:46 AM	Helium valve closed
5/21/2010	9:49:46 AM	H2 valve closed
5/21/2010	9:49:46 AM	BCl3 valve closed
5/21/2010	9:49:46 AM	PH3 valve closed
5/21/2010	9:49:46 AM	SiCl4 pre valve closed
5/21/2010	9:49:46 AM	SiCl4 post valve closed
5/21/2010	9:49:46 AM	Main Vac valve closed
5/21/2010	9:49:46 AM	Bypass valve closed
5/21/2010	9:49:46 AM	Bubbler valve closed
5/21/2010	9:49:46 AM	Helium MFC set to  0.000000
5/21/2010	9:49:46 AM	H2 MFC set to  0.000000
5/21/2010	9:49:46 AM	BCl3 MFC set to  0.000000
5/21/2010	9:49:46 AM	SiCl4 MFC set to  0.000000
5/21/2010	9:49:46 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:49:46 AM	Tube furnace set to 0
5/21/2010	9:49:46 AM	Run finished at 9:49 AM
5/21/2010	9:49:46 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	9:50:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	9:50:38 AM	Recipe started at 9:50 AM
5/21/2010	9:50:38 AM	Helium valve closed
5/21/2010	9:50:38 AM	H2 valve closed
5/21/2010	9:50:38 AM	BCl3 valve closed
5/21/2010	9:50:38 AM	PH3 valve closed
5/21/2010	9:50:38 AM	SiCl4 pre valve closed
5/21/2010	9:50:38 AM	SiCl4 post valve closed
5/21/2010	9:50:38 AM	Main Vac valve closed
5/21/2010	9:50:38 AM	Bubbler valve closed
5/21/2010	9:50:38 AM	Bypass valve opened
5/21/2010	9:50:38 AM	Helium MFC set to  0.000000
5/21/2010	9:50:38 AM	H2 MFC set to  0.000000
5/21/2010	9:50:38 AM	BCl3 MFC set to  0.000000
5/21/2010	9:50:38 AM	SiCl4 MFC set to  0.000000
5/21/2010	9:50:38 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:50:38 AM	Tube furnace set to 0
5/21/2010	9:51:10 AM	Helium valve closed
5/21/2010	9:51:10 AM	H2 valve closed
5/21/2010	9:51:10 AM	BCl3 valve closed
5/21/2010	9:51:11 AM	PH3 valve closed
5/21/2010	9:51:11 AM	SiCl4 pre valve closed
5/21/2010	9:51:11 AM	SiCl4 post valve closed
5/21/2010	9:51:11 AM	Bubbler valve closed
5/21/2010	9:51:11 AM	Main Vac valve opened
5/21/2010	9:51:11 AM	Bypass valve opened
5/21/2010	9:51:11 AM	Helium MFC set to  0.000000
5/21/2010	9:51:11 AM	H2 MFC set to  0.000000
5/21/2010	9:51:11 AM	BCl3 MFC set to  0.000000
5/21/2010	9:51:11 AM	SiCl4 MFC set to  0.000000
5/21/2010	9:51:11 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:51:11 AM	Tube furnace set to 0
5/21/2010	9:51:11 AM	Run finished at 9:51 AM
5/21/2010	9:51:11 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	9:53:15 AM	H2 MFC set to  100.000000
5/21/2010	9:53:21 AM	H2 MFC set to  0.000000
5/21/2010	9:53:24 AM	H2 MFC set to  0.000000
5/21/2010	9:53:27 AM	H2 MFC set to  0.000000
5/21/2010	9:53:29 AM	H2 MFC set to  0.000000
5/21/2010	9:53:31 AM	BCl3 MFC set to  0.000000
5/21/2010	9:53:36 AM	H2 MFC set to  0.000000
5/21/2010	9:53:40 AM	H2 MFC set to  0.000000
5/21/2010	9:54:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	9:54:44 AM	Recipe started at 9:54 AM
5/21/2010	9:54:44 AM	H2 valve closed
5/21/2010	9:54:44 AM	BCl3 valve closed
5/21/2010	9:54:44 AM	PH3 valve closed
5/21/2010	9:54:44 AM	SiCl4 pre valve closed
5/21/2010	9:54:44 AM	SiCl4 post valve closed
5/21/2010	9:54:44 AM	Main Vac valve closed
5/21/2010	9:54:44 AM	Bypass valve closed
5/21/2010	9:54:44 AM	Bubbler valve closed
5/21/2010	9:54:44 AM	Helium valve opened
5/21/2010	9:54:44 AM	Helium MFC set to  500.000000
5/21/2010	9:54:44 AM	H2 MFC set to  0.000000
5/21/2010	9:54:44 AM	BCl3 MFC set to  0.000000
5/21/2010	9:54:44 AM	SiCl4 MFC set to  0.000000
5/21/2010	9:54:44 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:54:44 AM	Tube furnace set to 0
5/21/2010	9:56:05 AM	Helium valve closed
5/21/2010	9:56:05 AM	H2 valve closed
5/21/2010	9:56:05 AM	BCl3 valve closed
5/21/2010	9:56:05 AM	PH3 valve closed
5/21/2010	9:56:05 AM	SiCl4 pre valve closed
5/21/2010	9:56:05 AM	SiCl4 post valve closed
5/21/2010	9:56:05 AM	Main Vac valve closed
5/21/2010	9:56:05 AM	Bypass valve closed
5/21/2010	9:56:05 AM	Bubbler valve closed
5/21/2010	9:56:05 AM	Helium MFC set to  0.000000
5/21/2010	9:56:05 AM	H2 MFC set to  0.000000
5/21/2010	9:56:05 AM	BCl3 MFC set to  0.000000
5/21/2010	9:56:05 AM	SiCl4 MFC set to  0.000000
5/21/2010	9:56:05 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:56:05 AM	Tube furnace set to 0
5/21/2010	9:56:05 AM	Run finished at 9:56 AM
5/21/2010	9:56:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	9:56:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	9:56:10 AM	Recipe started at 9:56 AM
5/21/2010	9:56:10 AM	Helium valve closed
5/21/2010	9:56:10 AM	H2 valve closed
5/21/2010	9:56:10 AM	BCl3 valve closed
5/21/2010	9:56:10 AM	PH3 valve closed
5/21/2010	9:56:10 AM	SiCl4 pre valve closed
5/21/2010	9:56:10 AM	SiCl4 post valve closed
5/21/2010	9:56:10 AM	Main Vac valve closed
5/21/2010	9:56:10 AM	Bubbler valve closed
5/21/2010	9:56:10 AM	Bypass valve opened
5/21/2010	9:56:10 AM	Helium MFC set to  0.000000
5/21/2010	9:56:10 AM	H2 MFC set to  0.000000
5/21/2010	9:56:10 AM	BCl3 MFC set to  0.000000
5/21/2010	9:56:10 AM	SiCl4 MFC set to  0.000000
5/21/2010	9:56:10 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:56:11 AM	Tube furnace set to 0
5/21/2010	9:56:43 AM	Helium valve closed
5/21/2010	9:56:43 AM	H2 valve closed
5/21/2010	9:56:43 AM	BCl3 valve closed
5/21/2010	9:56:43 AM	PH3 valve closed
5/21/2010	9:56:43 AM	SiCl4 pre valve closed
5/21/2010	9:56:43 AM	SiCl4 post valve closed
5/21/2010	9:56:43 AM	Bubbler valve closed
5/21/2010	9:56:43 AM	Main Vac valve opened
5/21/2010	9:56:43 AM	Bypass valve opened
5/21/2010	9:56:43 AM	Helium MFC set to  0.000000
5/21/2010	9:56:43 AM	H2 MFC set to  0.000000
5/21/2010	9:56:43 AM	BCl3 MFC set to  0.000000
5/21/2010	9:56:43 AM	SiCl4 MFC set to  0.000000
5/21/2010	9:56:43 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:56:43 AM	Tube furnace set to 0
5/21/2010	9:56:43 AM	Run finished at 9:56 AM
5/21/2010	9:56:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	9:58:10 AM	H2 MFC set to  100.000000
5/21/2010	9:58:14 AM	H2 MFC set to  100.000000
5/21/2010	9:58:19 AM	H2 MFC set to  0.000000
5/21/2010	9:58:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	9:58:55 AM	Recipe started at 9:58 AM
5/21/2010	9:58:55 AM	H2 valve closed
5/21/2010	9:58:55 AM	BCl3 valve closed
5/21/2010	9:58:55 AM	PH3 valve closed
5/21/2010	9:58:55 AM	SiCl4 pre valve closed
5/21/2010	9:58:55 AM	SiCl4 post valve closed
5/21/2010	9:58:55 AM	Main Vac valve closed
5/21/2010	9:58:55 AM	Bypass valve closed
5/21/2010	9:58:55 AM	Bubbler valve closed
5/21/2010	9:58:55 AM	Helium valve opened
5/21/2010	9:58:55 AM	Helium MFC set to  500.000000
5/21/2010	9:58:55 AM	H2 MFC set to  0.000000
5/21/2010	9:58:55 AM	BCl3 MFC set to  0.000000
5/21/2010	9:58:55 AM	SiCl4 MFC set to  0.000000
5/21/2010	9:58:55 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:58:55 AM	Tube furnace set to 0
5/21/2010	10:00:16 AM	Helium valve closed
5/21/2010	10:00:16 AM	H2 valve closed
5/21/2010	10:00:16 AM	BCl3 valve closed
5/21/2010	10:00:16 AM	PH3 valve closed
5/21/2010	10:00:16 AM	SiCl4 pre valve closed
5/21/2010	10:00:16 AM	SiCl4 post valve closed
5/21/2010	10:00:16 AM	Main Vac valve closed
5/21/2010	10:00:16 AM	Bypass valve closed
5/21/2010	10:00:16 AM	Bubbler valve closed
5/21/2010	10:00:16 AM	Helium MFC set to  0.000000
5/21/2010	10:00:16 AM	H2 MFC set to  0.000000
5/21/2010	10:00:16 AM	BCl3 MFC set to  0.000000
5/21/2010	10:00:16 AM	SiCl4 MFC set to  0.000000
5/21/2010	10:00:16 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	10:00:16 AM	Tube furnace set to 0
5/21/2010	10:00:16 AM	Run finished at 10:00 AM
5/21/2010	10:00:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	10:00:24 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	10:00:25 AM	Recipe started at 10:00 AM
5/21/2010	10:00:25 AM	Helium valve closed
5/21/2010	10:00:25 AM	H2 valve closed
5/21/2010	10:00:25 AM	BCl3 valve closed
5/21/2010	10:00:25 AM	PH3 valve closed
5/21/2010	10:00:25 AM	SiCl4 pre valve closed
5/21/2010	10:00:25 AM	SiCl4 post valve closed
5/21/2010	10:00:25 AM	Main Vac valve closed
5/21/2010	10:00:25 AM	Bubbler valve closed
5/21/2010	10:00:25 AM	Bypass valve opened
5/21/2010	10:00:25 AM	Helium MFC set to  0.000000
5/21/2010	10:00:25 AM	H2 MFC set to  0.000000
5/21/2010	10:00:25 AM	BCl3 MFC set to  0.000000
5/21/2010	10:00:25 AM	SiCl4 MFC set to  0.000000
5/21/2010	10:00:25 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	10:00:25 AM	Tube furnace set to 0
5/21/2010	10:00:57 AM	Helium valve closed
5/21/2010	10:00:57 AM	H2 valve closed
5/21/2010	10:00:57 AM	BCl3 valve closed
5/21/2010	10:00:57 AM	PH3 valve closed
5/21/2010	10:00:57 AM	SiCl4 pre valve closed
5/21/2010	10:00:57 AM	SiCl4 post valve closed
5/21/2010	10:00:57 AM	Bubbler valve closed
5/21/2010	10:00:57 AM	Main Vac valve opened
5/21/2010	10:00:57 AM	Bypass valve opened
5/21/2010	10:00:57 AM	Helium MFC set to  0.000000
5/21/2010	10:00:57 AM	H2 MFC set to  0.000000
5/21/2010	10:00:57 AM	BCl3 MFC set to  0.000000
5/21/2010	10:00:57 AM	SiCl4 MFC set to  0.000000
5/21/2010	10:00:57 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	10:00:58 AM	Tube furnace set to 0
5/21/2010	10:00:58 AM	Run finished at 10:00 AM
5/21/2010	10:00:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	10:20:36 AM	Main Vac valve closed
5/21/2010	10:20:37 AM	Bypass valve closed
5/21/2010	10:21:01 AM	Bypass valve opened
5/21/2010	10:21:01 AM	Main Vac valve opened
5/21/2010	10:21:29 AM	Recipe started at 10:21 AM
5/21/2010	10:21:29 AM	Helium valve closed
5/21/2010	10:21:29 AM	BCl3 valve closed
5/21/2010	10:21:29 AM	PH3 valve closed
5/21/2010	10:21:29 AM	SiCl4 pre valve closed
5/21/2010	10:21:29 AM	SiCl4 post valve closed
5/21/2010	10:21:29 AM	Main Vac valve closed
5/21/2010	10:21:29 AM	Bypass valve closed
5/21/2010	10:21:29 AM	Bubbler valve closed
5/21/2010	10:21:29 AM	H2 valve opened
5/21/2010	10:21:29 AM	Helium MFC set to  0.000000
5/21/2010	10:21:29 AM	H2 MFC set to  500.000000
5/21/2010	10:21:29 AM	BCl3 MFC set to  0.000000
5/21/2010	10:21:29 AM	SiCl4 MFC set to  0.000000
5/21/2010	10:21:29 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	10:21:29 AM	Tube furnace set to 0
5/21/2010	10:22:52 AM	Helium valve closed
5/21/2010	10:22:52 AM	BCl3 valve closed
5/21/2010	10:22:52 AM	PH3 valve closed
5/21/2010	10:22:52 AM	SiCl4 pre valve closed
5/21/2010	10:22:52 AM	SiCl4 post valve closed
5/21/2010	10:22:52 AM	Main Vac valve closed
5/21/2010	10:22:52 AM	Bypass valve closed
5/21/2010	10:22:52 AM	H2 valve opened
5/21/2010	10:22:52 AM	Bubbler valve opened
5/21/2010	10:22:52 AM	Helium MFC set to  0.000000
5/21/2010	10:22:52 AM	H2 MFC set to  500.000000
5/21/2010	10:22:52 AM	BCl3 MFC set to  0.000000
5/21/2010	10:22:52 AM	SiCl4 MFC set to  0.000000
5/21/2010	10:22:52 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	10:22:52 AM	Tube furnace set to 1000
5/21/2010	10:42:52 AM	Helium valve closed
5/21/2010	10:42:52 AM	PH3 valve closed
5/21/2010	10:42:52 AM	Main Vac valve closed
5/21/2010	10:42:52 AM	Bypass valve closed
5/21/2010	10:42:52 AM	H2 valve opened
5/21/2010	10:42:52 AM	BCl3 valve opened
5/21/2010	10:42:52 AM	SiCl4 pre valve opened
5/21/2010	10:42:52 AM	SiCl4 post valve opened
5/21/2010	10:42:52 AM	Bubbler valve opened
5/21/2010	10:42:52 AM	Helium MFC set to  0.000000
5/21/2010	10:42:52 AM	H2 MFC set to  500.000000
5/21/2010	10:42:52 AM	BCl3 MFC set to  35.000000
5/21/2010	10:42:52 AM	SiCl4 MFC set to  400.000000
5/21/2010	10:42:52 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	10:42:52 AM	Tube furnace set to 1000
5/21/2010	11:02:52 AM	H2 valve closed
5/21/2010	11:02:52 AM	BCl3 valve closed
5/21/2010	11:02:52 AM	PH3 valve closed
5/21/2010	11:02:52 AM	SiCl4 pre valve closed
5/21/2010	11:02:52 AM	SiCl4 post valve closed
5/21/2010	11:02:52 AM	Main Vac valve closed
5/21/2010	11:02:52 AM	Bypass valve closed
5/21/2010	11:02:52 AM	Helium valve opened
5/21/2010	11:02:52 AM	Bubbler valve opened
5/21/2010	11:02:52 AM	Helium MFC set to  500.000000
5/21/2010	11:02:52 AM	H2 MFC set to  0.000000
5/21/2010	11:02:52 AM	BCl3 MFC set to  0.000000
5/21/2010	11:02:52 AM	SiCl4 MFC set to  0.000000
5/21/2010	11:02:52 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	11:02:52 AM	Tube furnace set to 0
5/21/2010	11:22:52 AM	Helium valve closed
5/21/2010	11:22:52 AM	H2 valve closed
5/21/2010	11:22:52 AM	BCl3 valve closed
5/21/2010	11:22:52 AM	PH3 valve closed
5/21/2010	11:22:52 AM	SiCl4 pre valve closed
5/21/2010	11:22:52 AM	SiCl4 post valve closed
5/21/2010	11:22:52 AM	Main Vac valve closed
5/21/2010	11:22:52 AM	Bypass valve closed
5/21/2010	11:22:52 AM	Bubbler valve closed
5/21/2010	11:22:52 AM	Helium MFC set to  0.000000
5/21/2010	11:22:52 AM	H2 MFC set to  0.000000
5/21/2010	11:22:52 AM	BCl3 MFC set to  0.000000
5/21/2010	11:22:52 AM	SiCl4 MFC set to  0.000000
5/21/2010	11:22:52 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	11:22:52 AM	Tube furnace set to 0
5/21/2010	11:22:53 AM	Run finished at 11:22 AM
5/21/2010	11:23:35 AM	H2 MFC set to  100.000000
5/21/2010	11:23:48 AM	H2 MFC set to  50.000000
5/21/2010	11:23:54 AM	H2 MFC set to  0.000000
5/21/2010	11:24:25 AM	Program exited cleanly
5/21/2010	11:29:24 AM	Program started normally
5/21/2010	11:29:25 AM	Helium valve closed
5/21/2010	11:29:25 AM	H2 valve closed
5/21/2010	11:29:25 AM	BCl3 valve closed
5/21/2010	11:29:25 AM	PH3 valve closed
5/21/2010	11:29:25 AM	SiCl4 pre valve closed
5/21/2010	11:29:25 AM	SiCl4 post valve closed
5/21/2010	11:29:25 AM	Main Vac valve closed
5/21/2010	11:29:25 AM	Bypass valve closed
5/21/2010	11:29:25 AM	Bubbler valve closed
5/21/2010	11:29:26 AM	Helium MFC set to  0.000000
5/21/2010	11:29:26 AM	H2 MFC set to  0.000000
5/21/2010	11:29:26 AM	BCl3 MFC set to  0.000000
5/21/2010	11:29:26 AM	SiCl4 MFC set to  0.000000
5/21/2010	11:29:26 AM	Bypass solenoid MFC set to  760.000000
5/21/2010	11:29:27 AM	Tube furnace set to 0
5/21/2010	11:29:29 AM	H2 MFC set to  100.000000
5/21/2010	11:29:43 AM	Helium valve opened
5/21/2010	11:29:44 AM	Helium valve closed
5/21/2010	11:35:34 AM	Program started after a nonstandard shutdown
5/21/2010	11:35:34 AM	Helium valve closed
5/21/2010	11:35:34 AM	H2 valve closed
5/21/2010	11:35:34 AM	BCl3 valve closed
5/21/2010	11:35:34 AM	PH3 valve closed
5/21/2010	11:35:34 AM	SiCl4 pre valve closed
5/21/2010	11:35:34 AM	SiCl4 post valve closed
5/21/2010	11:35:34 AM	Main Vac valve closed
5/21/2010	11:35:34 AM	Bypass valve closed
5/21/2010	11:35:34 AM	Bubbler valve closed
5/21/2010	11:35:34 AM	Helium MFC set to  0.000000
5/21/2010	11:35:34 AM	H2 MFC set to  0.000000
5/21/2010	11:35:34 AM	BCl3 MFC set to  0.000000
5/21/2010	11:35:34 AM	SiCl4 MFC set to  0.000000
5/21/2010	11:35:34 AM	Bypass solenoid MFC set to  760.000000
5/21/2010	11:35:34 AM	Tube furnace set to 0
5/21/2010	11:35:38 AM	Helium MFC set to  100.000000
5/21/2010	11:35:41 AM	Helium MFC set to  0.000000
5/21/2010	11:35:49 AM	Program exited cleanly
5/21/2010	11:36:43 AM	Program started normally
5/21/2010	11:36:43 AM	Helium valve closed
5/21/2010	11:36:43 AM	H2 valve closed
5/21/2010	11:36:43 AM	BCl3 valve closed
5/21/2010	11:36:43 AM	PH3 valve closed
5/21/2010	11:36:43 AM	SiCl4 pre valve closed
5/21/2010	11:36:43 AM	SiCl4 post valve closed
5/21/2010	11:36:43 AM	Main Vac valve closed
5/21/2010	11:36:43 AM	Bypass valve closed
5/21/2010	11:36:43 AM	Bubbler valve closed
5/21/2010	11:36:43 AM	Helium MFC set to  0.000000
5/21/2010	11:36:43 AM	H2 MFC set to  0.000000
5/21/2010	11:36:43 AM	BCl3 MFC set to  0.000000
5/21/2010	11:36:43 AM	SiCl4 MFC set to  0.000000
5/21/2010	11:36:43 AM	Bypass solenoid MFC set to  760.000000
5/21/2010	11:36:43 AM	Tube furnace set to 0
5/21/2010	11:38:05 AM	Program exited cleanly
5/21/2010	11:39:12 AM	Program started normally
5/21/2010	11:39:12 AM	Helium valve closed
5/21/2010	11:39:12 AM	H2 valve closed
5/21/2010	11:39:12 AM	BCl3 valve closed
5/21/2010	11:39:12 AM	PH3 valve closed
5/21/2010	11:39:12 AM	SiCl4 pre valve closed
5/21/2010	11:39:12 AM	SiCl4 post valve closed
5/21/2010	11:39:12 AM	Main Vac valve closed
5/21/2010	11:39:12 AM	Bypass valve closed
5/21/2010	11:39:12 AM	Bubbler valve closed
5/21/2010	11:39:12 AM	Helium MFC set to  0.000000
5/21/2010	11:39:12 AM	H2 MFC set to  0.000000
5/21/2010	11:39:12 AM	BCl3 MFC set to  0.000000
5/21/2010	11:39:12 AM	SiCl4 MFC set to  0.000000
5/21/2010	11:39:12 AM	Bypass solenoid MFC set to  760.000000
5/21/2010	11:39:12 AM	Tube furnace set to 0
5/21/2010	11:39:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	11:39:17 AM	Recipe started at 11:39 AM
5/21/2010	11:39:17 AM	Helium valve closed
5/21/2010	11:39:17 AM	H2 valve closed
5/21/2010	11:39:17 AM	BCl3 valve closed
5/21/2010	11:39:17 AM	PH3 valve closed
5/21/2010	11:39:17 AM	SiCl4 pre valve closed
5/21/2010	11:39:17 AM	SiCl4 post valve closed
5/21/2010	11:39:17 AM	Main Vac valve closed
5/21/2010	11:39:17 AM	Bubbler valve closed
5/21/2010	11:39:17 AM	Bypass valve opened
5/21/2010	11:39:17 AM	Helium MFC set to  0.000000
5/21/2010	11:39:17 AM	H2 MFC set to  0.000000
5/21/2010	11:39:17 AM	BCl3 MFC set to  0.000000
5/21/2010	11:39:17 AM	SiCl4 MFC set to  0.000000
5/21/2010	11:39:17 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	11:39:17 AM	Tube furnace set to 0
5/21/2010	11:40:04 AM	Helium valve closed
5/21/2010	11:40:04 AM	H2 valve closed
5/21/2010	11:40:04 AM	BCl3 valve closed
5/21/2010	11:40:04 AM	PH3 valve closed
5/21/2010	11:40:04 AM	SiCl4 pre valve closed
5/21/2010	11:40:04 AM	SiCl4 post valve closed
5/21/2010	11:40:04 AM	Bubbler valve closed
5/21/2010	11:40:04 AM	Main Vac valve opened
5/21/2010	11:40:04 AM	Bypass valve opened
5/21/2010	11:40:04 AM	Helium MFC set to  0.000000
5/21/2010	11:40:04 AM	H2 MFC set to  0.000000
5/21/2010	11:40:04 AM	BCl3 MFC set to  0.000000
5/21/2010	11:40:04 AM	SiCl4 MFC set to  0.000000
5/21/2010	11:40:04 AM	Bypass solenoid MFC set to  0.000000
5/21/2010	11:40:05 AM	Tube furnace set to 0
5/21/2010	11:40:05 AM	Run finished at 11:40 AM
5/21/2010	11:40:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	11:40:12 AM	Tube furnace set to 1000
5/21/2010	11:41:34 AM	Bypass valve closed
5/21/2010	11:41:34 AM	Main Vac valve closed
5/21/2010	11:41:43 AM	Main Vac valve opened
5/21/2010	11:41:43 AM	Bypass valve opened
5/21/2010	11:48:29 AM	H2 MFC set to  500.000000
5/21/2010	11:48:38 AM	Bypass valve closed
5/21/2010	11:48:39 AM	Main Vac valve closed
5/21/2010	11:48:41 AM	H2 valve opened
5/21/2010	11:49:53 AM	Bubbler valve opened
5/21/2010	11:50:15 AM	SiCl4 MFC set to  325.000000
5/21/2010	11:50:45 AM	SiCl4 MFC set to  400.000000
5/21/2010	11:50:58 AM	SiCl4 MFC set to  0.000000
5/21/2010	11:51:10 AM	SiCl4 MFC set to  10.000000
5/21/2010	11:51:17 AM	SiCl4 MFC set to  50.000000
5/21/2010	11:51:23 AM	SiCl4 MFC set to  100.000000
5/21/2010	11:52:17 AM	Tube furnace set to 0
5/21/2010	11:52:42 AM	Helium MFC set to  500.000000
5/21/2010	11:52:44 AM	Helium valve opened
5/21/2010	11:52:45 AM	H2 valve closed
5/21/2010	11:57:14 AM	SiCl4 MFC set to  0.000000
5/21/2010	11:57:22 AM	SiCl4 MFC set to  10.000000
5/21/2010	11:57:33 AM	SiCl4 MFC set to  50.000000
5/21/2010	11:57:43 AM	SiCl4 MFC set to  300.000000
5/21/2010	11:59:14 AM	Bubbler valve closed
5/21/2010	11:59:15 AM	Helium valve closed
5/21/2010	11:59:19 AM	Bypass valve opened
5/21/2010	12:05:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	12:05:50 PM	Recipe started at 12:05 PM
5/21/2010	12:05:50 PM	H2 valve closed
5/21/2010	12:05:50 PM	BCl3 valve closed
5/21/2010	12:05:50 PM	PH3 valve closed
5/21/2010	12:05:50 PM	SiCl4 pre valve closed
5/21/2010	12:05:50 PM	SiCl4 post valve closed
5/21/2010	12:05:50 PM	Main Vac valve closed
5/21/2010	12:05:50 PM	Bypass valve closed
5/21/2010	12:05:50 PM	Bubbler valve closed
5/21/2010	12:05:51 PM	Helium valve opened
5/21/2010	12:05:51 PM	Helium MFC set to  500.000000
5/21/2010	12:05:51 PM	H2 MFC set to  0.000000
5/21/2010	12:05:51 PM	BCl3 MFC set to  0.000000
5/21/2010	12:05:51 PM	SiCl4 MFC set to  0.000000
5/21/2010	12:05:51 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	12:05:51 PM	Tube furnace set to 0
5/21/2010	12:07:08 PM	Helium valve closed
5/21/2010	12:07:08 PM	H2 valve closed
5/21/2010	12:07:08 PM	BCl3 valve closed
5/21/2010	12:07:08 PM	PH3 valve closed
5/21/2010	12:07:08 PM	SiCl4 pre valve closed
5/21/2010	12:07:08 PM	SiCl4 post valve closed
5/21/2010	12:07:08 PM	Main Vac valve closed
5/21/2010	12:07:08 PM	Bypass valve closed
5/21/2010	12:07:08 PM	Bubbler valve closed
5/21/2010	12:07:08 PM	Helium MFC set to  0.000000
5/21/2010	12:07:08 PM	H2 MFC set to  0.000000
5/21/2010	12:07:08 PM	BCl3 MFC set to  0.000000
5/21/2010	12:07:08 PM	SiCl4 MFC set to  0.000000
5/21/2010	12:07:08 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	12:07:08 PM	Tube furnace set to 0
5/21/2010	12:07:08 PM	Run finished at 12:07 PM
5/21/2010	12:07:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	12:11:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	12:11:13 PM	Recipe started at 12:11 PM
5/21/2010	12:11:13 PM	Helium valve closed
5/21/2010	12:11:13 PM	H2 valve closed
5/21/2010	12:11:13 PM	BCl3 valve closed
5/21/2010	12:11:13 PM	PH3 valve closed
5/21/2010	12:11:13 PM	SiCl4 pre valve closed
5/21/2010	12:11:13 PM	SiCl4 post valve closed
5/21/2010	12:11:13 PM	Main Vac valve closed
5/21/2010	12:11:13 PM	Bubbler valve closed
5/21/2010	12:11:13 PM	Bypass valve opened
5/21/2010	12:11:13 PM	Helium MFC set to  0.000000
5/21/2010	12:11:13 PM	H2 MFC set to  0.000000
5/21/2010	12:11:13 PM	BCl3 MFC set to  0.000000
5/21/2010	12:11:13 PM	SiCl4 MFC set to  0.000000
5/21/2010	12:11:13 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	12:11:13 PM	Tube furnace set to 0
5/21/2010	12:11:57 PM	Helium valve closed
5/21/2010	12:11:57 PM	H2 valve closed
5/21/2010	12:11:57 PM	BCl3 valve closed
5/21/2010	12:11:57 PM	PH3 valve closed
5/21/2010	12:11:57 PM	SiCl4 pre valve closed
5/21/2010	12:11:57 PM	SiCl4 post valve closed
5/21/2010	12:11:57 PM	Bubbler valve closed
5/21/2010	12:11:57 PM	Main Vac valve opened
5/21/2010	12:11:57 PM	Bypass valve opened
5/21/2010	12:11:57 PM	Helium MFC set to  0.000000
5/21/2010	12:11:57 PM	H2 MFC set to  0.000000
5/21/2010	12:11:57 PM	BCl3 MFC set to  0.000000
5/21/2010	12:11:57 PM	SiCl4 MFC set to  0.000000
5/21/2010	12:11:57 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	12:11:57 PM	Tube furnace set to 0
5/21/2010	12:11:58 PM	Run finished at 12:11 PM
5/21/2010	12:11:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	12:13:02 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	12:13:03 PM	Recipe started at 12:13 PM
5/21/2010	12:13:03 PM	H2 valve closed
5/21/2010	12:13:03 PM	BCl3 valve closed
5/21/2010	12:13:03 PM	PH3 valve closed
5/21/2010	12:13:03 PM	SiCl4 pre valve closed
5/21/2010	12:13:03 PM	SiCl4 post valve closed
5/21/2010	12:13:03 PM	Main Vac valve closed
5/21/2010	12:13:03 PM	Bypass valve closed
5/21/2010	12:13:03 PM	Bubbler valve closed
5/21/2010	12:13:03 PM	Helium valve opened
5/21/2010	12:13:03 PM	Helium MFC set to  500.000000
5/21/2010	12:13:03 PM	H2 MFC set to  0.000000
5/21/2010	12:13:03 PM	BCl3 MFC set to  0.000000
5/21/2010	12:13:03 PM	SiCl4 MFC set to  0.000000
5/21/2010	12:13:03 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	12:13:03 PM	Tube furnace set to 0
5/21/2010	12:14:20 PM	Helium valve closed
5/21/2010	12:14:20 PM	H2 valve closed
5/21/2010	12:14:20 PM	BCl3 valve closed
5/21/2010	12:14:20 PM	PH3 valve closed
5/21/2010	12:14:20 PM	SiCl4 pre valve closed
5/21/2010	12:14:20 PM	SiCl4 post valve closed
5/21/2010	12:14:20 PM	Main Vac valve closed
5/21/2010	12:14:20 PM	Bypass valve closed
5/21/2010	12:14:20 PM	Bubbler valve closed
5/21/2010	12:14:20 PM	Helium MFC set to  0.000000
5/21/2010	12:14:20 PM	H2 MFC set to  0.000000
5/21/2010	12:14:20 PM	BCl3 MFC set to  0.000000
5/21/2010	12:14:20 PM	SiCl4 MFC set to  0.000000
5/21/2010	12:14:20 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	12:14:20 PM	Tube furnace set to 0
5/21/2010	12:14:20 PM	Run finished at 12:14 PM
5/21/2010	12:14:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	12:14:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	12:14:42 PM	Recipe started at 12:14 PM
5/21/2010	12:14:42 PM	Helium valve closed
5/21/2010	12:14:42 PM	H2 valve closed
5/21/2010	12:14:42 PM	BCl3 valve closed
5/21/2010	12:14:42 PM	PH3 valve closed
5/21/2010	12:14:42 PM	SiCl4 pre valve closed
5/21/2010	12:14:42 PM	SiCl4 post valve closed
5/21/2010	12:14:42 PM	Main Vac valve closed
5/21/2010	12:14:42 PM	Bubbler valve closed
5/21/2010	12:14:42 PM	Bypass valve opened
5/21/2010	12:14:42 PM	Helium MFC set to  0.000000
5/21/2010	12:14:42 PM	H2 MFC set to  0.000000
5/21/2010	12:14:42 PM	BCl3 MFC set to  0.000000
5/21/2010	12:14:42 PM	SiCl4 MFC set to  0.000000
5/21/2010	12:14:42 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	12:14:42 PM	Tube furnace set to 0
5/21/2010	12:15:14 PM	Helium valve closed
5/21/2010	12:15:14 PM	H2 valve closed
5/21/2010	12:15:14 PM	BCl3 valve closed
5/21/2010	12:15:14 PM	PH3 valve closed
5/21/2010	12:15:14 PM	SiCl4 pre valve closed
5/21/2010	12:15:14 PM	SiCl4 post valve closed
5/21/2010	12:15:14 PM	Bubbler valve closed
5/21/2010	12:15:14 PM	Main Vac valve opened
5/21/2010	12:15:14 PM	Bypass valve opened
5/21/2010	12:15:14 PM	Helium MFC set to  0.000000
5/21/2010	12:15:14 PM	H2 MFC set to  0.000000
5/21/2010	12:15:14 PM	BCl3 MFC set to  0.000000
5/21/2010	12:15:14 PM	SiCl4 MFC set to  0.000000
5/21/2010	12:15:14 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	12:15:14 PM	Tube furnace set to 0
5/21/2010	12:15:14 PM	Run finished at 12:15 PM
5/21/2010	12:15:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	12:29:16 PM	Helium MFC set to  100.000000
5/21/2010	12:29:18 PM	Helium valve opened
5/21/2010	12:30:27 PM	Helium valve closed
5/21/2010	12:32:42 PM	Recipe started at 12:32 PM
5/21/2010	12:32:42 PM	Helium valve closed
5/21/2010	12:32:42 PM	BCl3 valve closed
5/21/2010	12:32:42 PM	PH3 valve closed
5/21/2010	12:32:42 PM	SiCl4 pre valve closed
5/21/2010	12:32:42 PM	SiCl4 post valve closed
5/21/2010	12:32:42 PM	Main Vac valve closed
5/21/2010	12:32:42 PM	Bypass valve closed
5/21/2010	12:32:42 PM	Bubbler valve closed
5/21/2010	12:32:42 PM	H2 valve opened
5/21/2010	12:32:42 PM	Helium MFC set to  0.000000
5/21/2010	12:32:42 PM	H2 MFC set to  500.000000
5/21/2010	12:32:42 PM	BCl3 MFC set to  0.000000
5/21/2010	12:32:42 PM	SiCl4 MFC set to  0.000000
5/21/2010	12:32:42 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	12:32:42 PM	Tube furnace set to 0
5/21/2010	12:34:01 PM	Helium valve closed
5/21/2010	12:34:01 PM	BCl3 valve closed
5/21/2010	12:34:01 PM	PH3 valve closed
5/21/2010	12:34:01 PM	SiCl4 pre valve closed
5/21/2010	12:34:01 PM	SiCl4 post valve closed
5/21/2010	12:34:01 PM	Main Vac valve closed
5/21/2010	12:34:01 PM	Bypass valve closed
5/21/2010	12:34:01 PM	H2 valve opened
5/21/2010	12:34:01 PM	Bubbler valve opened
5/21/2010	12:34:01 PM	Helium MFC set to  0.000000
5/21/2010	12:34:01 PM	H2 MFC set to  500.000000
5/21/2010	12:34:01 PM	BCl3 MFC set to  0.000000
5/21/2010	12:34:01 PM	SiCl4 MFC set to  0.000000
5/21/2010	12:34:01 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	12:34:01 PM	Tube furnace set to 1000
5/21/2010	12:54:01 PM	Helium valve closed
5/21/2010	12:54:01 PM	PH3 valve closed
5/21/2010	12:54:01 PM	Main Vac valve closed
5/21/2010	12:54:01 PM	Bypass valve closed
5/21/2010	12:54:01 PM	H2 valve opened
5/21/2010	12:54:01 PM	BCl3 valve opened
5/21/2010	12:54:01 PM	SiCl4 pre valve opened
5/21/2010	12:54:01 PM	SiCl4 post valve opened
5/21/2010	12:54:01 PM	Bubbler valve opened
5/21/2010	12:54:01 PM	Helium MFC set to  0.000000
5/21/2010	12:54:01 PM	H2 MFC set to  500.000000
5/21/2010	12:54:01 PM	BCl3 MFC set to  35.000000
5/21/2010	12:54:01 PM	SiCl4 MFC set to  400.000000
5/21/2010	12:54:01 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	12:54:02 PM	Tube furnace set to 1000
5/21/2010	1:14:02 PM	H2 valve closed
5/21/2010	1:14:02 PM	BCl3 valve closed
5/21/2010	1:14:02 PM	PH3 valve closed
5/21/2010	1:14:02 PM	SiCl4 pre valve closed
5/21/2010	1:14:02 PM	SiCl4 post valve closed
5/21/2010	1:14:02 PM	Main Vac valve closed
5/21/2010	1:14:02 PM	Bypass valve closed
5/21/2010	1:14:02 PM	Helium valve opened
5/21/2010	1:14:02 PM	Bubbler valve opened
5/21/2010	1:14:02 PM	Helium MFC set to  500.000000
5/21/2010	1:14:02 PM	H2 MFC set to  0.000000
5/21/2010	1:14:02 PM	BCl3 MFC set to  0.000000
5/21/2010	1:14:02 PM	SiCl4 MFC set to  0.000000
5/21/2010	1:14:02 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	1:14:02 PM	Tube furnace set to 0
5/21/2010	1:34:02 PM	Helium valve closed
5/21/2010	1:34:02 PM	H2 valve closed
5/21/2010	1:34:02 PM	BCl3 valve closed
5/21/2010	1:34:02 PM	PH3 valve closed
5/21/2010	1:34:02 PM	SiCl4 pre valve closed
5/21/2010	1:34:02 PM	SiCl4 post valve closed
5/21/2010	1:34:02 PM	Main Vac valve closed
5/21/2010	1:34:02 PM	Bypass valve closed
5/21/2010	1:34:02 PM	Bubbler valve closed
5/21/2010	1:34:02 PM	Helium MFC set to  0.000000
5/21/2010	1:34:02 PM	H2 MFC set to  0.000000
5/21/2010	1:34:02 PM	BCl3 MFC set to  0.000000
5/21/2010	1:34:02 PM	SiCl4 MFC set to  0.000000
5/21/2010	1:34:02 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	1:34:02 PM	Tube furnace set to 0
5/21/2010	1:34:02 PM	Run finished at 1:34 PM
5/21/2010	1:56:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	1:56:31 PM	Recipe started at 1:56 PM
5/21/2010	1:56:31 PM	Helium valve closed
5/21/2010	1:56:31 PM	H2 valve closed
5/21/2010	1:56:31 PM	BCl3 valve closed
5/21/2010	1:56:31 PM	PH3 valve closed
5/21/2010	1:56:31 PM	SiCl4 pre valve closed
5/21/2010	1:56:31 PM	SiCl4 post valve closed
5/21/2010	1:56:31 PM	Main Vac valve closed
5/21/2010	1:56:31 PM	Bubbler valve closed
5/21/2010	1:56:31 PM	Bypass valve opened
5/21/2010	1:56:31 PM	Helium MFC set to  0.000000
5/21/2010	1:56:31 PM	H2 MFC set to  0.000000
5/21/2010	1:56:31 PM	BCl3 MFC set to  0.000000
5/21/2010	1:56:31 PM	SiCl4 MFC set to  0.000000
5/21/2010	1:56:31 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	1:56:31 PM	Tube furnace set to 0
5/21/2010	1:57:19 PM	Helium valve closed
5/21/2010	1:57:19 PM	H2 valve closed
5/21/2010	1:57:19 PM	BCl3 valve closed
5/21/2010	1:57:19 PM	PH3 valve closed
5/21/2010	1:57:19 PM	SiCl4 pre valve closed
5/21/2010	1:57:19 PM	SiCl4 post valve closed
5/21/2010	1:57:19 PM	Bubbler valve closed
5/21/2010	1:57:19 PM	Main Vac valve opened
5/21/2010	1:57:19 PM	Bypass valve opened
5/21/2010	1:57:19 PM	Helium MFC set to  0.000000
5/21/2010	1:57:19 PM	H2 MFC set to  0.000000
5/21/2010	1:57:19 PM	BCl3 MFC set to  0.000000
5/21/2010	1:57:19 PM	SiCl4 MFC set to  0.000000
5/21/2010	1:57:19 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	1:57:19 PM	Tube furnace set to 0
5/21/2010	1:57:20 PM	Run finished at 1:57 PM
5/21/2010	1:57:20 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	2:00:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	2:00:59 PM	Recipe started at 2:00 PM
5/21/2010	2:00:59 PM	H2 valve closed
5/21/2010	2:00:59 PM	BCl3 valve closed
5/21/2010	2:00:59 PM	PH3 valve closed
5/21/2010	2:00:59 PM	SiCl4 pre valve closed
5/21/2010	2:00:59 PM	SiCl4 post valve closed
5/21/2010	2:00:59 PM	Main Vac valve closed
5/21/2010	2:00:59 PM	Bypass valve closed
5/21/2010	2:00:59 PM	Bubbler valve closed
5/21/2010	2:00:59 PM	Helium valve opened
5/21/2010	2:00:59 PM	Helium MFC set to  500.000000
5/21/2010	2:00:59 PM	H2 MFC set to  0.000000
5/21/2010	2:00:59 PM	BCl3 MFC set to  0.000000
5/21/2010	2:00:59 PM	SiCl4 MFC set to  0.000000
5/21/2010	2:00:59 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	2:01:00 PM	Tube furnace set to 0
5/21/2010	2:02:17 PM	Helium valve closed
5/21/2010	2:02:17 PM	H2 valve closed
5/21/2010	2:02:17 PM	BCl3 valve closed
5/21/2010	2:02:17 PM	PH3 valve closed
5/21/2010	2:02:17 PM	SiCl4 pre valve closed
5/21/2010	2:02:17 PM	SiCl4 post valve closed
5/21/2010	2:02:17 PM	Main Vac valve closed
5/21/2010	2:02:17 PM	Bypass valve closed
5/21/2010	2:02:17 PM	Bubbler valve closed
5/21/2010	2:02:17 PM	Helium MFC set to  0.000000
5/21/2010	2:02:17 PM	H2 MFC set to  0.000000
5/21/2010	2:02:17 PM	BCl3 MFC set to  0.000000
5/21/2010	2:02:17 PM	SiCl4 MFC set to  0.000000
5/21/2010	2:02:17 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	2:02:17 PM	Tube furnace set to 0
5/21/2010	2:02:17 PM	Run finished at 2:02 PM
5/21/2010	2:02:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	2:02:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	2:02:22 PM	Recipe started at 2:02 PM
5/21/2010	2:02:22 PM	Helium valve closed
5/21/2010	2:02:22 PM	H2 valve closed
5/21/2010	2:02:22 PM	BCl3 valve closed
5/21/2010	2:02:22 PM	PH3 valve closed
5/21/2010	2:02:22 PM	SiCl4 pre valve closed
5/21/2010	2:02:22 PM	SiCl4 post valve closed
5/21/2010	2:02:22 PM	Main Vac valve closed
5/21/2010	2:02:22 PM	Bubbler valve closed
5/21/2010	2:02:22 PM	Bypass valve opened
5/21/2010	2:02:22 PM	Helium MFC set to  0.000000
5/21/2010	2:02:22 PM	H2 MFC set to  0.000000
5/21/2010	2:02:22 PM	BCl3 MFC set to  0.000000
5/21/2010	2:02:22 PM	SiCl4 MFC set to  0.000000
5/21/2010	2:02:22 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	2:02:22 PM	Tube furnace set to 0
5/21/2010	2:02:54 PM	Helium valve closed
5/21/2010	2:02:54 PM	H2 valve closed
5/21/2010	2:02:54 PM	BCl3 valve closed
5/21/2010	2:02:54 PM	PH3 valve closed
5/21/2010	2:02:54 PM	SiCl4 pre valve closed
5/21/2010	2:02:54 PM	SiCl4 post valve closed
5/21/2010	2:02:54 PM	Bubbler valve closed
5/21/2010	2:02:54 PM	Main Vac valve opened
5/21/2010	2:02:54 PM	Bypass valve opened
5/21/2010	2:02:54 PM	Helium MFC set to  0.000000
5/21/2010	2:02:54 PM	H2 MFC set to  0.000000
5/21/2010	2:02:54 PM	BCl3 MFC set to  0.000000
5/21/2010	2:02:54 PM	SiCl4 MFC set to  0.000000
5/21/2010	2:02:54 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	2:02:54 PM	Tube furnace set to 0
5/21/2010	2:02:54 PM	Run finished at 2:02 PM
5/21/2010	2:02:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	2:05:36 PM	Helium MFC set to  100.000000
5/21/2010	2:05:37 PM	Helium valve opened
5/21/2010	2:17:30 PM	Helium valve closed
5/21/2010	2:28:52 PM	Recipe started at 2:28 PM
5/21/2010	2:28:52 PM	Helium valve closed
5/21/2010	2:28:52 PM	BCl3 valve closed
5/21/2010	2:28:52 PM	PH3 valve closed
5/21/2010	2:28:52 PM	SiCl4 pre valve closed
5/21/2010	2:28:52 PM	SiCl4 post valve closed
5/21/2010	2:28:52 PM	Main Vac valve closed
5/21/2010	2:28:52 PM	Bypass valve closed
5/21/2010	2:28:52 PM	Bubbler valve closed
5/21/2010	2:28:52 PM	H2 valve opened
5/21/2010	2:28:52 PM	Helium MFC set to  0.000000
5/21/2010	2:28:52 PM	H2 MFC set to  500.000000
5/21/2010	2:28:52 PM	BCl3 MFC set to  0.000000
5/21/2010	2:28:52 PM	SiCl4 MFC set to  0.000000
5/21/2010	2:28:52 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	2:28:52 PM	Tube furnace set to 0
5/21/2010	2:30:12 PM	Helium valve closed
5/21/2010	2:30:12 PM	BCl3 valve closed
5/21/2010	2:30:12 PM	PH3 valve closed
5/21/2010	2:30:12 PM	SiCl4 pre valve closed
5/21/2010	2:30:12 PM	SiCl4 post valve closed
5/21/2010	2:30:12 PM	Main Vac valve closed
5/21/2010	2:30:12 PM	Bypass valve closed
5/21/2010	2:30:12 PM	H2 valve opened
5/21/2010	2:30:12 PM	Bubbler valve opened
5/21/2010	2:30:12 PM	Helium MFC set to  0.000000
5/21/2010	2:30:12 PM	H2 MFC set to  500.000000
5/21/2010	2:30:12 PM	BCl3 MFC set to  0.000000
5/21/2010	2:30:12 PM	SiCl4 MFC set to  0.000000
5/21/2010	2:30:12 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	2:30:12 PM	Tube furnace set to 1000
5/21/2010	2:50:12 PM	Helium valve closed
5/21/2010	2:50:12 PM	PH3 valve closed
5/21/2010	2:50:12 PM	Main Vac valve closed
5/21/2010	2:50:12 PM	Bypass valve closed
5/21/2010	2:50:12 PM	H2 valve opened
5/21/2010	2:50:12 PM	BCl3 valve opened
5/21/2010	2:50:12 PM	SiCl4 pre valve opened
5/21/2010	2:50:12 PM	SiCl4 post valve opened
5/21/2010	2:50:12 PM	Bubbler valve opened
5/21/2010	2:50:12 PM	Helium MFC set to  0.000000
5/21/2010	2:50:12 PM	H2 MFC set to  500.000000
5/21/2010	2:50:12 PM	BCl3 MFC set to  35.000000
5/21/2010	2:50:12 PM	SiCl4 MFC set to  400.000000
5/21/2010	2:50:12 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	2:50:12 PM	Tube furnace set to 1000
5/21/2010	3:10:12 PM	H2 valve closed
5/21/2010	3:10:12 PM	BCl3 valve closed
5/21/2010	3:10:12 PM	PH3 valve closed
5/21/2010	3:10:12 PM	SiCl4 pre valve closed
5/21/2010	3:10:12 PM	SiCl4 post valve closed
5/21/2010	3:10:12 PM	Main Vac valve closed
5/21/2010	3:10:12 PM	Bypass valve closed
5/21/2010	3:10:12 PM	Helium valve opened
5/21/2010	3:10:12 PM	Bubbler valve opened
5/21/2010	3:10:12 PM	Helium MFC set to  500.000000
5/21/2010	3:10:12 PM	H2 MFC set to  0.000000
5/21/2010	3:10:12 PM	BCl3 MFC set to  0.000000
5/21/2010	3:10:12 PM	SiCl4 MFC set to  0.000000
5/21/2010	3:10:12 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	3:10:12 PM	Tube furnace set to 0
5/21/2010	3:30:12 PM	Helium valve closed
5/21/2010	3:30:12 PM	H2 valve closed
5/21/2010	3:30:12 PM	BCl3 valve closed
5/21/2010	3:30:12 PM	PH3 valve closed
5/21/2010	3:30:12 PM	SiCl4 pre valve closed
5/21/2010	3:30:12 PM	SiCl4 post valve closed
5/21/2010	3:30:12 PM	Main Vac valve closed
5/21/2010	3:30:12 PM	Bypass valve closed
5/21/2010	3:30:12 PM	Bubbler valve closed
5/21/2010	3:30:12 PM	Helium MFC set to  0.000000
5/21/2010	3:30:12 PM	H2 MFC set to  0.000000
5/21/2010	3:30:12 PM	BCl3 MFC set to  0.000000
5/21/2010	3:30:12 PM	SiCl4 MFC set to  0.000000
5/21/2010	3:30:12 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	3:30:12 PM	Tube furnace set to 0
5/21/2010	3:30:12 PM	Run finished at 3:30 PM
5/21/2010	3:44:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	3:44:47 PM	Recipe started at 3:44 PM
5/21/2010	3:44:47 PM	Helium valve closed
5/21/2010	3:44:47 PM	H2 valve closed
5/21/2010	3:44:47 PM	BCl3 valve closed
5/21/2010	3:44:47 PM	PH3 valve closed
5/21/2010	3:44:47 PM	SiCl4 pre valve closed
5/21/2010	3:44:47 PM	SiCl4 post valve closed
5/21/2010	3:44:47 PM	Main Vac valve closed
5/21/2010	3:44:47 PM	Bubbler valve closed
5/21/2010	3:44:47 PM	Bypass valve opened
5/21/2010	3:44:47 PM	Helium MFC set to  0.000000
5/21/2010	3:44:47 PM	H2 MFC set to  0.000000
5/21/2010	3:44:47 PM	BCl3 MFC set to  0.000000
5/21/2010	3:44:47 PM	SiCl4 MFC set to  0.000000
5/21/2010	3:44:47 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	3:44:47 PM	Tube furnace set to 0
5/21/2010	3:45:34 PM	Helium valve closed
5/21/2010	3:45:34 PM	H2 valve closed
5/21/2010	3:45:34 PM	BCl3 valve closed
5/21/2010	3:45:34 PM	PH3 valve closed
5/21/2010	3:45:34 PM	SiCl4 pre valve closed
5/21/2010	3:45:34 PM	SiCl4 post valve closed
5/21/2010	3:45:34 PM	Bubbler valve closed
5/21/2010	3:45:34 PM	Main Vac valve opened
5/21/2010	3:45:34 PM	Bypass valve opened
5/21/2010	3:45:34 PM	Helium MFC set to  0.000000
5/21/2010	3:45:34 PM	H2 MFC set to  0.000000
5/21/2010	3:45:34 PM	BCl3 MFC set to  0.000000
5/21/2010	3:45:34 PM	SiCl4 MFC set to  0.000000
5/21/2010	3:45:34 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	3:45:34 PM	Tube furnace set to 0
5/21/2010	3:45:34 PM	Run finished at 3:45 PM
5/21/2010	3:45:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	3:47:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	3:47:08 PM	Recipe started at 3:47 PM
5/21/2010	3:47:08 PM	H2 valve closed
5/21/2010	3:47:08 PM	BCl3 valve closed
5/21/2010	3:47:08 PM	PH3 valve closed
5/21/2010	3:47:08 PM	SiCl4 pre valve closed
5/21/2010	3:47:08 PM	SiCl4 post valve closed
5/21/2010	3:47:08 PM	Main Vac valve closed
5/21/2010	3:47:08 PM	Bypass valve closed
5/21/2010	3:47:08 PM	Bubbler valve closed
5/21/2010	3:47:08 PM	Helium valve opened
5/21/2010	3:47:08 PM	Helium MFC set to  500.000000
5/21/2010	3:47:08 PM	H2 MFC set to  0.000000
5/21/2010	3:47:08 PM	BCl3 MFC set to  0.000000
5/21/2010	3:47:08 PM	SiCl4 MFC set to  0.000000
5/21/2010	3:47:08 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	3:47:09 PM	Tube furnace set to 0
5/21/2010	3:48:26 PM	Helium valve closed
5/21/2010	3:48:26 PM	H2 valve closed
5/21/2010	3:48:26 PM	BCl3 valve closed
5/21/2010	3:48:26 PM	PH3 valve closed
5/21/2010	3:48:26 PM	SiCl4 pre valve closed
5/21/2010	3:48:26 PM	SiCl4 post valve closed
5/21/2010	3:48:26 PM	Main Vac valve closed
5/21/2010	3:48:26 PM	Bypass valve closed
5/21/2010	3:48:26 PM	Bubbler valve closed
5/21/2010	3:48:26 PM	Helium MFC set to  0.000000
5/21/2010	3:48:26 PM	H2 MFC set to  0.000000
5/21/2010	3:48:26 PM	BCl3 MFC set to  0.000000
5/21/2010	3:48:26 PM	SiCl4 MFC set to  0.000000
5/21/2010	3:48:26 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	3:48:26 PM	Tube furnace set to 0
5/21/2010	3:48:27 PM	Run finished at 3:48 PM
5/21/2010	3:48:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/21/2010	4:01:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	4:01:46 PM	Recipe started at 4:01 PM
5/21/2010	4:01:46 PM	Helium valve closed
5/21/2010	4:01:46 PM	H2 valve closed
5/21/2010	4:01:46 PM	BCl3 valve closed
5/21/2010	4:01:46 PM	PH3 valve closed
5/21/2010	4:01:46 PM	SiCl4 pre valve closed
5/21/2010	4:01:46 PM	SiCl4 post valve closed
5/21/2010	4:01:46 PM	Main Vac valve closed
5/21/2010	4:01:46 PM	Bubbler valve closed
5/21/2010	4:01:46 PM	Bypass valve opened
5/21/2010	4:01:46 PM	Helium MFC set to  0.000000
5/21/2010	4:01:46 PM	H2 MFC set to  0.000000
5/21/2010	4:01:46 PM	BCl3 MFC set to  0.000000
5/21/2010	4:01:46 PM	SiCl4 MFC set to  0.000000
5/21/2010	4:01:46 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	4:01:47 PM	Tube furnace set to 0
5/21/2010	4:02:18 PM	Helium valve closed
5/21/2010	4:02:18 PM	H2 valve closed
5/21/2010	4:02:18 PM	BCl3 valve closed
5/21/2010	4:02:18 PM	PH3 valve closed
5/21/2010	4:02:18 PM	SiCl4 pre valve closed
5/21/2010	4:02:18 PM	SiCl4 post valve closed
5/21/2010	4:02:18 PM	Bubbler valve closed
5/21/2010	4:02:18 PM	Main Vac valve opened
5/21/2010	4:02:18 PM	Bypass valve opened
5/21/2010	4:02:18 PM	Helium MFC set to  0.000000
5/21/2010	4:02:18 PM	H2 MFC set to  0.000000
5/21/2010	4:02:18 PM	BCl3 MFC set to  0.000000
5/21/2010	4:02:18 PM	SiCl4 MFC set to  0.000000
5/21/2010	4:02:18 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	4:02:18 PM	Tube furnace set to 0
5/21/2010	4:02:19 PM	Run finished at 4:02 PM
5/21/2010	4:02:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	4:12:08 PM	Helium MFC set to  100.000000
5/21/2010	4:12:08 PM	Helium valve opened
5/21/2010	4:12:51 PM	Helium valve closed
5/21/2010	4:12:58 PM	Helium MFC set to  0.000000
5/21/2010	4:15:15 PM	Recipe started at 4:15 PM
5/21/2010	4:15:15 PM	Helium valve closed
5/21/2010	4:15:15 PM	BCl3 valve closed
5/21/2010	4:15:15 PM	PH3 valve closed
5/21/2010	4:15:15 PM	SiCl4 pre valve closed
5/21/2010	4:15:15 PM	SiCl4 post valve closed
5/21/2010	4:15:15 PM	Main Vac valve closed
5/21/2010	4:15:15 PM	Bypass valve closed
5/21/2010	4:15:15 PM	Bubbler valve closed
5/21/2010	4:15:15 PM	H2 valve opened
5/21/2010	4:15:15 PM	Helium MFC set to  0.000000
5/21/2010	4:15:15 PM	H2 MFC set to  500.000000
5/21/2010	4:15:15 PM	BCl3 MFC set to  0.000000
5/21/2010	4:15:15 PM	SiCl4 MFC set to  0.000000
5/21/2010	4:15:15 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	4:15:16 PM	Tube furnace set to 0
5/21/2010	4:16:35 PM	Helium valve closed
5/21/2010	4:16:35 PM	BCl3 valve closed
5/21/2010	4:16:35 PM	PH3 valve closed
5/21/2010	4:16:35 PM	SiCl4 pre valve closed
5/21/2010	4:16:35 PM	SiCl4 post valve closed
5/21/2010	4:16:35 PM	Main Vac valve closed
5/21/2010	4:16:35 PM	Bypass valve closed
5/21/2010	4:16:35 PM	H2 valve opened
5/21/2010	4:16:35 PM	Bubbler valve opened
5/21/2010	4:16:35 PM	Helium MFC set to  0.000000
5/21/2010	4:16:35 PM	H2 MFC set to  500.000000
5/21/2010	4:16:35 PM	BCl3 MFC set to  0.000000
5/21/2010	4:16:35 PM	SiCl4 MFC set to  0.000000
5/21/2010	4:16:35 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	4:16:35 PM	Tube furnace set to 1000
5/21/2010	4:36:35 PM	Helium valve closed
5/21/2010	4:36:35 PM	PH3 valve closed
5/21/2010	4:36:35 PM	Main Vac valve closed
5/21/2010	4:36:35 PM	Bypass valve closed
5/21/2010	4:36:35 PM	H2 valve opened
5/21/2010	4:36:35 PM	BCl3 valve opened
5/21/2010	4:36:35 PM	SiCl4 pre valve opened
5/21/2010	4:36:35 PM	SiCl4 post valve opened
5/21/2010	4:36:35 PM	Bubbler valve opened
5/21/2010	4:36:35 PM	Helium MFC set to  0.000000
5/21/2010	4:36:35 PM	H2 MFC set to  500.000000
5/21/2010	4:36:35 PM	BCl3 MFC set to  35.000000
5/21/2010	4:36:35 PM	SiCl4 MFC set to  400.000000
5/21/2010	4:36:35 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	4:36:35 PM	Tube furnace set to 1000
5/21/2010	4:56:35 PM	H2 valve closed
5/21/2010	4:56:35 PM	BCl3 valve closed
5/21/2010	4:56:35 PM	PH3 valve closed
5/21/2010	4:56:35 PM	SiCl4 pre valve closed
5/21/2010	4:56:35 PM	SiCl4 post valve closed
5/21/2010	4:56:35 PM	Main Vac valve closed
5/21/2010	4:56:35 PM	Bypass valve closed
5/21/2010	4:56:35 PM	Helium valve opened
5/21/2010	4:56:35 PM	Bubbler valve opened
5/21/2010	4:56:35 PM	Helium MFC set to  500.000000
5/21/2010	4:56:35 PM	H2 MFC set to  0.000000
5/21/2010	4:56:35 PM	BCl3 MFC set to  0.000000
5/21/2010	4:56:35 PM	SiCl4 MFC set to  0.000000
5/21/2010	4:56:35 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	4:56:35 PM	Tube furnace set to 0
5/21/2010	5:16:35 PM	Helium valve closed
5/21/2010	5:16:35 PM	H2 valve closed
5/21/2010	5:16:35 PM	BCl3 valve closed
5/21/2010	5:16:35 PM	PH3 valve closed
5/21/2010	5:16:35 PM	SiCl4 pre valve closed
5/21/2010	5:16:35 PM	SiCl4 post valve closed
5/21/2010	5:16:35 PM	Main Vac valve closed
5/21/2010	5:16:35 PM	Bypass valve closed
5/21/2010	5:16:35 PM	Bubbler valve closed
5/21/2010	5:16:35 PM	Helium MFC set to  0.000000
5/21/2010	5:16:35 PM	H2 MFC set to  0.000000
5/21/2010	5:16:35 PM	BCl3 MFC set to  0.000000
5/21/2010	5:16:35 PM	SiCl4 MFC set to  0.000000
5/21/2010	5:16:35 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	5:16:35 PM	Tube furnace set to 0
5/21/2010	5:16:35 PM	Run finished at 5:16 PM
5/21/2010	5:28:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	5:28:43 PM	Recipe started at 5:28 PM
5/21/2010	5:28:43 PM	Helium valve closed
5/21/2010	5:28:43 PM	H2 valve closed
5/21/2010	5:28:43 PM	BCl3 valve closed
5/21/2010	5:28:43 PM	PH3 valve closed
5/21/2010	5:28:43 PM	SiCl4 pre valve closed
5/21/2010	5:28:43 PM	SiCl4 post valve closed
5/21/2010	5:28:43 PM	Main Vac valve closed
5/21/2010	5:28:43 PM	Bubbler valve closed
5/21/2010	5:28:43 PM	Bypass valve opened
5/21/2010	5:28:43 PM	Helium MFC set to  0.000000
5/21/2010	5:28:43 PM	H2 MFC set to  0.000000
5/21/2010	5:28:43 PM	BCl3 MFC set to  0.000000
5/21/2010	5:28:43 PM	SiCl4 MFC set to  0.000000
5/21/2010	5:28:43 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	5:28:43 PM	Tube furnace set to 0
5/21/2010	5:29:30 PM	Helium valve closed
5/21/2010	5:29:30 PM	H2 valve closed
5/21/2010	5:29:30 PM	BCl3 valve closed
5/21/2010	5:29:30 PM	PH3 valve closed
5/21/2010	5:29:30 PM	SiCl4 pre valve closed
5/21/2010	5:29:30 PM	SiCl4 post valve closed
5/21/2010	5:29:30 PM	Bubbler valve closed
5/21/2010	5:29:30 PM	Main Vac valve opened
5/21/2010	5:29:30 PM	Bypass valve opened
5/21/2010	5:29:30 PM	Helium MFC set to  0.000000
5/21/2010	5:29:30 PM	H2 MFC set to  0.000000
5/21/2010	5:29:30 PM	BCl3 MFC set to  0.000000
5/21/2010	5:29:30 PM	SiCl4 MFC set to  0.000000
5/21/2010	5:29:30 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	5:29:30 PM	Tube furnace set to 0
5/21/2010	5:29:31 PM	Run finished at 5:29 PM
5/21/2010	5:29:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	8:17:34 PM	Recipe started at 8:17 PM
5/21/2010	8:17:34 PM	Helium valve closed
5/21/2010	8:17:34 PM	BCl3 valve closed
5/21/2010	8:17:34 PM	PH3 valve closed
5/21/2010	8:17:34 PM	SiCl4 pre valve closed
5/21/2010	8:17:34 PM	SiCl4 post valve closed
5/21/2010	8:17:34 PM	Main Vac valve closed
5/21/2010	8:17:34 PM	Bypass valve closed
5/21/2010	8:17:34 PM	Bubbler valve closed
5/21/2010	8:17:34 PM	H2 valve opened
5/21/2010	8:17:34 PM	Helium MFC set to  0.000000
5/21/2010	8:17:34 PM	H2 MFC set to  500.000000
5/21/2010	8:17:34 PM	BCl3 MFC set to  0.000000
5/21/2010	8:17:34 PM	SiCl4 MFC set to  0.000000
5/21/2010	8:17:34 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	8:17:34 PM	Tube furnace set to 0
5/21/2010	8:18:56 PM	Helium valve closed
5/21/2010	8:18:56 PM	BCl3 valve closed
5/21/2010	8:18:56 PM	PH3 valve closed
5/21/2010	8:18:56 PM	SiCl4 pre valve closed
5/21/2010	8:18:56 PM	SiCl4 post valve closed
5/21/2010	8:18:56 PM	Main Vac valve closed
5/21/2010	8:18:56 PM	Bypass valve closed
5/21/2010	8:18:56 PM	H2 valve opened
5/21/2010	8:18:56 PM	Bubbler valve opened
5/21/2010	8:18:56 PM	Helium MFC set to  0.000000
5/21/2010	8:18:56 PM	H2 MFC set to  500.000000
5/21/2010	8:18:56 PM	BCl3 MFC set to  0.000000
5/21/2010	8:18:56 PM	SiCl4 MFC set to  0.000000
5/21/2010	8:18:56 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	8:18:56 PM	Tube furnace set to 0
5/21/2010	8:20:47 PM	Run aborted at 8:20 PM
5/21/2010	8:20:47 PM	Helium valve closed
5/21/2010	8:20:47 PM	H2 valve closed
5/21/2010	8:20:47 PM	BCl3 valve closed
5/21/2010	8:20:47 PM	PH3 valve closed
5/21/2010	8:20:47 PM	SiCl4 pre valve closed
5/21/2010	8:20:47 PM	SiCl4 post valve closed
5/21/2010	8:20:47 PM	Bypass valve closed
5/21/2010	8:20:47 PM	Main Vac valve closed
5/21/2010	8:20:47 PM	Bubbler valve closed
5/21/2010	8:20:47 PM	Helium MFC set to  0.000000
5/21/2010	8:20:47 PM	H2 MFC set to  0.000000
5/21/2010	8:20:47 PM	BCl3 MFC set to  0.000000
5/21/2010	8:20:47 PM	SiCl4 MFC set to  0.000000
5/21/2010	8:20:47 PM	Tube furnace set to 0
5/21/2010	8:20:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	8:20:54 PM	Recipe started at 8:20 PM
5/21/2010	8:20:54 PM	Helium valve closed
5/21/2010	8:20:54 PM	H2 valve closed
5/21/2010	8:20:54 PM	BCl3 valve closed
5/21/2010	8:20:54 PM	PH3 valve closed
5/21/2010	8:20:54 PM	SiCl4 pre valve closed
5/21/2010	8:20:54 PM	SiCl4 post valve closed
5/21/2010	8:20:54 PM	Main Vac valve closed
5/21/2010	8:20:54 PM	Bubbler valve closed
5/21/2010	8:20:54 PM	Bypass valve opened
5/21/2010	8:20:54 PM	Helium MFC set to  0.000000
5/21/2010	8:20:54 PM	H2 MFC set to  0.000000
5/21/2010	8:20:54 PM	BCl3 MFC set to  0.000000
5/21/2010	8:20:54 PM	SiCl4 MFC set to  0.000000
5/21/2010	8:20:54 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	8:20:54 PM	Tube furnace set to 0
5/21/2010	8:21:14 PM	Helium valve closed
5/21/2010	8:21:14 PM	H2 valve closed
5/21/2010	8:21:14 PM	BCl3 valve closed
5/21/2010	8:21:14 PM	PH3 valve closed
5/21/2010	8:21:14 PM	SiCl4 pre valve closed
5/21/2010	8:21:14 PM	SiCl4 post valve closed
5/21/2010	8:21:14 PM	Bubbler valve closed
5/21/2010	8:21:14 PM	Main Vac valve opened
5/21/2010	8:21:14 PM	Bypass valve opened
5/21/2010	8:21:14 PM	Helium MFC set to  0.000000
5/21/2010	8:21:14 PM	H2 MFC set to  0.000000
5/21/2010	8:21:14 PM	BCl3 MFC set to  0.000000
5/21/2010	8:21:14 PM	SiCl4 MFC set to  0.000000
5/21/2010	8:21:14 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	8:21:14 PM	Tube furnace set to 0
5/21/2010	8:21:14 PM	Run finished at 8:21 PM
5/21/2010	8:21:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	8:22:07 PM	Recipe started at 8:22 PM
5/21/2010	8:22:07 PM	Helium valve closed
5/21/2010	8:22:07 PM	BCl3 valve closed
5/21/2010	8:22:07 PM	PH3 valve closed
5/21/2010	8:22:07 PM	SiCl4 pre valve closed
5/21/2010	8:22:07 PM	SiCl4 post valve closed
5/21/2010	8:22:07 PM	Main Vac valve closed
5/21/2010	8:22:07 PM	Bypass valve closed
5/21/2010	8:22:07 PM	Bubbler valve closed
5/21/2010	8:22:07 PM	H2 valve opened
5/21/2010	8:22:07 PM	Helium MFC set to  0.000000
5/21/2010	8:22:07 PM	H2 MFC set to  500.000000
5/21/2010	8:22:07 PM	BCl3 MFC set to  0.000000
5/21/2010	8:22:07 PM	SiCl4 MFC set to  0.000000
5/21/2010	8:22:07 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	8:22:07 PM	Tube furnace set to 0
5/21/2010	8:23:29 PM	Helium valve closed
5/21/2010	8:23:29 PM	BCl3 valve closed
5/21/2010	8:23:29 PM	PH3 valve closed
5/21/2010	8:23:29 PM	SiCl4 pre valve closed
5/21/2010	8:23:29 PM	SiCl4 post valve closed
5/21/2010	8:23:29 PM	Main Vac valve closed
5/21/2010	8:23:29 PM	Bypass valve closed
5/21/2010	8:23:29 PM	H2 valve opened
5/21/2010	8:23:29 PM	Bubbler valve opened
5/21/2010	8:23:29 PM	Helium MFC set to  0.000000
5/21/2010	8:23:29 PM	H2 MFC set to  500.000000
5/21/2010	8:23:29 PM	BCl3 MFC set to  0.000000
5/21/2010	8:23:29 PM	SiCl4 MFC set to  0.000000
5/21/2010	8:23:29 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	8:23:29 PM	Tube furnace set to 1000
5/21/2010	8:43:29 PM	Helium valve closed
5/21/2010	8:43:29 PM	PH3 valve closed
5/21/2010	8:43:29 PM	Main Vac valve closed
5/21/2010	8:43:29 PM	Bypass valve closed
5/21/2010	8:43:29 PM	H2 valve opened
5/21/2010	8:43:29 PM	BCl3 valve opened
5/21/2010	8:43:29 PM	SiCl4 pre valve opened
5/21/2010	8:43:29 PM	SiCl4 post valve opened
5/21/2010	8:43:29 PM	Bubbler valve opened
5/21/2010	8:43:29 PM	Helium MFC set to  0.000000
5/21/2010	8:43:29 PM	H2 MFC set to  500.000000
5/21/2010	8:43:29 PM	BCl3 MFC set to  0.000000
5/21/2010	8:43:29 PM	SiCl4 MFC set to  325.000000
5/21/2010	8:43:29 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	8:43:29 PM	Tube furnace set to 1000
5/21/2010	9:03:29 PM	H2 valve closed
5/21/2010	9:03:29 PM	BCl3 valve closed
5/21/2010	9:03:29 PM	PH3 valve closed
5/21/2010	9:03:29 PM	SiCl4 pre valve closed
5/21/2010	9:03:29 PM	SiCl4 post valve closed
5/21/2010	9:03:29 PM	Main Vac valve closed
5/21/2010	9:03:29 PM	Bypass valve closed
5/21/2010	9:03:29 PM	Helium valve opened
5/21/2010	9:03:29 PM	Bubbler valve opened
5/21/2010	9:03:29 PM	Helium MFC set to  500.000000
5/21/2010	9:03:29 PM	H2 MFC set to  0.000000
5/21/2010	9:03:29 PM	BCl3 MFC set to  0.000000
5/21/2010	9:03:29 PM	SiCl4 MFC set to  0.000000
5/21/2010	9:03:29 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:03:30 PM	Tube furnace set to 0
5/21/2010	9:23:30 PM	Helium valve closed
5/21/2010	9:23:30 PM	H2 valve closed
5/21/2010	9:23:30 PM	BCl3 valve closed
5/21/2010	9:23:30 PM	PH3 valve closed
5/21/2010	9:23:30 PM	SiCl4 pre valve closed
5/21/2010	9:23:30 PM	SiCl4 post valve closed
5/21/2010	9:23:30 PM	Main Vac valve closed
5/21/2010	9:23:30 PM	Bypass valve closed
5/21/2010	9:23:30 PM	Bubbler valve closed
5/21/2010	9:23:30 PM	Helium MFC set to  0.000000
5/21/2010	9:23:30 PM	H2 MFC set to  0.000000
5/21/2010	9:23:30 PM	BCl3 MFC set to  0.000000
5/21/2010	9:23:30 PM	SiCl4 MFC set to  0.000000
5/21/2010	9:23:30 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:23:30 PM	Tube furnace set to 0
5/21/2010	9:23:30 PM	Run finished at 9:23 PM
5/21/2010	9:47:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/21/2010	9:47:51 PM	Recipe started at 9:47 PM
5/21/2010	9:47:51 PM	Helium valve closed
5/21/2010	9:47:51 PM	H2 valve closed
5/21/2010	9:47:51 PM	BCl3 valve closed
5/21/2010	9:47:51 PM	PH3 valve closed
5/21/2010	9:47:51 PM	SiCl4 pre valve closed
5/21/2010	9:47:51 PM	SiCl4 post valve closed
5/21/2010	9:47:51 PM	Main Vac valve closed
5/21/2010	9:47:51 PM	Bubbler valve closed
5/21/2010	9:47:51 PM	Bypass valve opened
5/21/2010	9:47:51 PM	Helium MFC set to  0.000000
5/21/2010	9:47:51 PM	H2 MFC set to  0.000000
5/21/2010	9:47:51 PM	BCl3 MFC set to  0.000000
5/21/2010	9:47:51 PM	SiCl4 MFC set to  0.000000
5/21/2010	9:47:51 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:47:51 PM	Tube furnace set to 0
5/21/2010	9:48:37 PM	Helium valve closed
5/21/2010	9:48:37 PM	H2 valve closed
5/21/2010	9:48:37 PM	BCl3 valve closed
5/21/2010	9:48:37 PM	PH3 valve closed
5/21/2010	9:48:37 PM	SiCl4 pre valve closed
5/21/2010	9:48:37 PM	SiCl4 post valve closed
5/21/2010	9:48:37 PM	Bubbler valve closed
5/21/2010	9:48:37 PM	Main Vac valve opened
5/21/2010	9:48:37 PM	Bypass valve opened
5/21/2010	9:48:37 PM	Helium MFC set to  0.000000
5/21/2010	9:48:37 PM	H2 MFC set to  0.000000
5/21/2010	9:48:37 PM	BCl3 MFC set to  0.000000
5/21/2010	9:48:37 PM	SiCl4 MFC set to  0.000000
5/21/2010	9:48:37 PM	Bypass solenoid MFC set to  0.000000
5/21/2010	9:48:37 PM	Tube furnace set to 0
5/21/2010	9:48:37 PM	Run finished at 9:48 PM
5/21/2010	9:48:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
